Cold Vacuum Chuck

Cold Vacuum Chuck to measure all types of single sided microstrip devices

Chuck sliced

You see several slices of the vacuum-cooling jig:
First comes the ground plate with its two functionalities, first to hold the final removable jig by vacuum and secondly to provide the vacuum for further layers.
It is followed by a cooling plate, which channels the cooling liquid underneath the silicon at ~-10°C. The in- and outlets can easily be removed.It is thermally isolated form the basement of the jig and the stages.
Third you see the vacuum plate with 4 different subgroups. One (just a hole) for simple diodes. The main chamber, a large addition and finally a separate line which is only used for wedge shape sensors.
The last pieces shows the final upper plate which holds the silicon, by vacumm provided through the visible holes. A ledge is mounted to have a fixed reference for the sensors.
The whole area is large enough to house a full 6" wafer.

Here are the Autocad files (DWG from ACAD 2000 plus DXF from ACAD 14)
Drawings of the chucks
Drawings of the homemade bias probes
Drawings of the airspill

Frank Hartmann, hartmann@fnal.gov

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